The BDS VIMM - Variable
Inductor Manual Matching Unit - is the most compact RF 13.56 MHz
inductive manual matching network currently available on the
market with some unique features described in the below
The intended use is in low
pressure plasma system like sputtering, PECVD, plasma cleaning,
plasma etching and plasma activation.
One of its key feature is the very compact and easy design
with great advantages of the internal variable inductor circuit.
The optimal installation is directly above the vacuum chamber
electrical feedthrough. The mechanical layout can be adjusted to
match any customer requirement.
CE MARK - MADE IN ITALY