The newest and most price
competitive medium frequency generator for any High/Low Voltage (
3Kv to7Kv )PECVD and PVD processes
BDS-MF 5 - 10 - 15 kW @ 40kHz, High|Low Voltage AC plasma
The BDS-MF is a 40 kHz
plasma generator with max power delivery of 5, 10 or 15 kW is
specifically designed for plasma excitation on PECVD or plasma
cleaning applications. The unit is capable of delivery up to 10kW
at 7000V RMS output.
The output is balanced
type, capable to drive 2 symmetrical electrodes. Tipical
application is PE-CVD process on large process chambers. A unique
features is the high voltage matching transformer built in 2
(standard) or 3 (on request) transformer taps are available as
User only needs to connect
two coaxial cables to the electrodes. Interface with the user's
PLC can be both analog or digital RS232 or Profibus (upon
Highlights and benefits:
- Output matching transformer is built in. No
external box is required.
- Air cooled unit. No risk associated with
moisture or water leakage.
- Full power with ambient temperature up to
- Analog interface.
- Profibus interface available upon request.
- Front panel display makes installation and
trouble shooting easier.
- High efficiency >90%.
- Compact and lightweight construction, only
CE MARK - MADE IN ITALY