BDS AMN 750 RF Auto Matching Network
BDS AMN 750 RF Auto
BDS AMN 750 Auto Matching Unit
BDISCOM is introducing a
new generation of automatic matching network units operating at
the standard ISM frequency of 13.56 MHz intended for industrial
and laboratory use. Typical application include Sputtering
process, PECVD deposition, plasma activation, dielectric heating,
laser excitation and more.
- Model BDS-AMN 750: Auto Matching based on
variable air caps rated for 3000 V | up to 20 A. Analog user
port pin compatible with BDS.HF 200, 300 and 750 Watt generators.
The BDS-AMN 750 is an
impedance matching network to be used in HF (13.56 MHz) plasma
application, transform the complex impedance of the load in a 50
Ohm resistive. The tuning circuit is L type using high quality
variable caps and precision positioning motors. Typical tuning
type is less than 2 seconds. Also a TEE configuration for medium
impedance load is available.
A wide range of full preset
or one channel only preset is possible. Itâ€™s also possible a full
independent operation with only one external switch to recall
ignition position is required. A DC BIAS measurement circuit
permits to monitor DC BIAS, scaled of a factor of 100.
Direct interfacing with all
Bdiscom RF generators. 3 Channel RF output on one single matching
available (vacuum relays) as option.
BDS-AMN 750 auto matching specifications in attached PDF:
CE MARK - MADE IN ITALY