BDS SP 3, 6 and 12 Sputter Power Supplies
New Bdiscom power supply series for DC sputter processes.
Three range available:
* 3KW F.S., 1000 Volt F.S., 6 Amps Max Output
* 6KW F.S., 1000 Volt F.S., 12 Amps Max Output
* 12KW F.S., 1000 Volt F.S., 25 Amps Max Output
Arc detection (< 200
nSec ) and digital interfaces. Suitable for mid range R/D and
industrial DC sputter tools
New Bdiscom DC power
supplies for Sputtering deposition.
Some highlights:
* All units equipped with
user friendly active touch screen display
* Ignition voltage up to
1,1 kVolt
* Arc detection DV/DT off
time < 1mSec
* Cooling air
- Power requirements: 400VAC - 3PH 50Hz (±10%)
- Max power output: 3, 6 and 12kw F.S.
- Max voltage output: 1000 Volt F.S.
- Max current output: 6, 12 and 25 Amps
- Ignition: 1,1 KVolt
- Arc Detector: < 200 nSec detection, < 1
mSec DV/DT offtime
- Efficiency: > 90 %
- Display: Touch panel 240x128 pixel
- Regulation mode: Power / Voltage / Current
(Selectable)
- Cooling: Air (forced)
- Interfaces: RS 232 - Profibus - A/D (Profibus
Option)
- Operating Temperature: 5-40 ° C
- Dimensions: 19†RACK - 4HU
EMC classification
according to EN 55011:
This is a ISM (Industrial
Scientific Medical) Equipment and it is EN 55011 Group 2, Class A
compliant.
CE MARK - MADE IN ITALY